| 9746315 |
Side illumination in interferometry |
Son Bui, Dong Chen, Matthew Jarrod Novak |
2017-08-29 |
| 9664509 |
Signal sectioning for profiling printed-circuit-bord vias with vertical scanning interferometry |
Erik Novak |
2017-05-30 |
| 9372079 |
Optical plate for calibration of coordinate measuring machines |
Tay-Chang Wu, Jaime Duran, John Christopher Boney, Shawn David McDermed, Son Bui +1 more |
2016-06-21 |
| 9282304 |
Full-color images produced by white-light interferometry |
Florin Munteanu |
2016-03-08 |
| 8953171 |
Signal sectioning for profiling printed-circuit-board vias with vertical scanning interferometry |
Erik Novak |
2015-02-10 |
| 8275573 |
Large-surface defect detection by single-frame spatial-carrier interferometry |
Florin Munteanu |
2012-09-25 |
| 8072610 |
Polarization mirau interference microscope |
Parameswaran Hariharan |
2011-12-06 |
| 7505863 |
Interferometric iterative technique with bandwidth and numerical-aperture dependency |
Florin Munteanu |
2009-03-17 |
| 7283250 |
Measurement of object deformation with optical profiler |
Paul R. Unruh, Erik Novak |
2007-10-16 |
| 7119909 |
Film thickness and boundary characterization by interferometric profilometry |
Paul R. Unruh, Erik Novak |
2006-10-10 |
| 6987570 |
Reference signal for stitching of interferometric profiles |
Artur Olszak |
2006-01-17 |
| 6847460 |
Alignment and correction template for optical profilometric measurement |
Colin Farrell, Anthony L. Martinez, Michael B. Krell |
2005-01-25 |
| 6624893 |
Correction of scanning errors in interferometric profiling |
Artur Olszak |
2003-09-23 |
| 6624894 |
Scanning interferometry with reference signal |
Artur Olszak |
2003-09-23 |
| 6493093 |
Bat-wing attenuation in white-light interferometry |
Akiko Harasaki |
2002-12-10 |
| 5991461 |
Selection process for sequentially combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map |
Mark A. Schmucker |
1999-11-23 |