| 12174071 |
System, apparatus, and method for improved background correction and calibration of optical devices |
Chris Pylant, Andrew Weeks Kueny |
2024-12-24 |
| 12090825 |
Rear door assembly |
Bobby Fuentes, Slavomir Borkowski, Craig Bosanko, Christopher M. Thompson |
2024-09-17 |
| 11885682 |
System, apparatus, and method for spectral filtering |
Chris Pylant, Timothy Michals |
2024-01-30 |
| 11424115 |
Multimode configurable spectrometer |
Larry Arlos Bullock, Richard J. Daignault, Jr., Mark Meloni, Mike Whelan |
2022-08-23 |
| 10794763 |
Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer |
Mark Meloni |
2020-10-06 |
| 10365212 |
System and method for calibration of optical signals in semiconductor process systems |
Andrew Weeks Kueny, Mike Whelan, Mark Meloni, Rick Daignault, Sean Lynes |
2019-07-30 |
| 9801265 |
High dynamic range measurement system for process monitoring |
Larry Arlos Bullock, Mark Meloni, Mike Whelan |
2017-10-24 |
| 9772226 |
Referenced and stabilized optical measurement system |
Andrew Weeks Kueny, Mark Meloni |
2017-09-26 |
| 9383323 |
Workpiece characterization system |
Mark Meloni, Andrew Weeks Kueny, Mike Whelan |
2016-07-05 |
| 9310250 |
High dynamic range measurement system for process monitoring |
Larry Arlos Bullock, Mark Meloni, Mike Whelan |
2016-04-12 |
| 8125633 |
Calibration of a radiometric optical monitoring system used for fault detection and process monitoring |
Mike Whelan, Andrew Weeks Kueny, Kenneth C. Harvey |
2012-02-28 |
| 6979704 |
Optical polymer blend with bimodal particle sizes |
Thomas Mayer, Timothy D. Goodman |
2005-12-27 |
| 6795243 |
Polarizing light pipe |
Anthony D. McGettigan, Clark Pentico, Markus Duelli, Edward S. Sherman |
2004-09-21 |