Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7310129 | Method for carrying out a double or multiple exposure | Jens Stäcker, Heiko Hommen, Marlene Strobl, Karl-Heinz Schumacher | 2007-12-18 |
| 7186484 | Method for determining the relative positional accuracy of two structure elements on a wafer | Heiko Hommen, Jens Stäcker, Maria de la Piedad Fernandez-Martinez, Thorsten Schedel | 2007-03-06 |