Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360771 | Electrostatic clamp, lithographic apparatus, and device manufacturing method | Eugene Maria Brinkhof, Anko Jozef Cornelus Sijben, Johannes Wilhelmus Damen | 2016-06-07 |
| 9354528 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre, Johannes Wilhelmus Damen, Eugene Maria Brinkhof, Yogesh Pramod Karade | 2016-05-31 |
| 7628875 | MEMS device and assembly method | Raymond Jacobus Wilhelmus Knaapen, Gerard Johannes Pieter Nijsse, Gerard Kums | 2009-12-08 |