Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300888 | Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product | Richard Johannes Franciscus Van Haren, Leon Paul VAN DIJK, Ronald Henricus Johannes OTTEN | 2022-04-12 |
| 11300889 | Metrology apparatus | Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Subodh Singh, Ronald Henricus Johannes OTTEN, Amandev Singh | 2022-04-12 |
| 11226567 | Methods and apparatus for use in a device manufacturing method | Richard Johannes Franciscus Van Haren, Leon Paul VAN DIJK, Ronald Henricus Johannes OTTEN, Mahdi SADEGHINIA | 2022-01-18 |
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Tiannan GUAN, Raymond Wilhelmus Louis Lafarre, Bas Johannes Petrus ROSET, Siegfried Alexander Tromp +1 more | 2019-01-29 |