Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5757409 | Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus | Yoshihiko Okamoto, Haruo Yoda, Yukinobu Shibata, Akira Hirakawa, Norio Saitou +2 more | 1998-05-26 |
| 5557314 | Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus | Yoshihiko Okamoto, Haruo Yoda, Yukinobu Shibata, Akira Hirakawa, Norio Saitou +2 more | 1996-09-17 |
| 5206517 | Electron beam lithographic method | Yukinobu Shibata, Akira Hirakawa, Tadao Konishi | 1993-04-27 |