Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920234 | Yttrium oxide based coating composition | Vahid Firouzdor, Christopher Laurent Beaudry, Joseph Behnke, Joseph F. Sommers | 2024-03-05 |
| 11661650 | Yttrium oxide based coating composition | Vahid Firouzdor, Christopher Laurent Beaudry, Joseph Behnke, Joseph F. Sommers | 2023-05-30 |
| 11209478 | Pulse system verification | Sathyendra Ghantasala | 2021-12-28 |
| 10607815 | Methods and apparatuses for plasma chamber matching and fault identification | Sathyendra Ghantasala, Vijayakumar C. Venugopal | 2020-03-31 |
| 10553397 | Processing chamber hardware fault detection using spectral radio frequency analysis | Sathyendra Ghantasala, Vijayakumar C. Venugopal | 2020-02-04 |
| 10283320 | Processing chamber hardware fault detection using spectral radio frequency analysis | Sathyendra Ghantasala, Vijayakumar C. Venugopal | 2019-05-07 |