Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Vasily Pashkovskiy, Chansoo Kang, Youngdo Kim, Sangki Nam +2 more | 2024-09-10 |
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Sangki Nam +3 more | 2024-03-26 |
| 11287323 | Semiconductor substrate measuring apparatus, semiconductor substrate processing apparatus and semiconductor device manufacturing method using the same | Vladmir Protopopov, Minju Kim | 2022-03-29 |