Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337356 | Moving assembly for recovery guard and substrate processing apparatus | Won Sik SON, Pil Kyun HEO | 2025-06-24 |
| 12237181 | Support unit and substrate treating apparatus | Do Yeon Kim, Hyun YOON | 2025-02-25 |
| 11961695 | Substrate treating apparatus, ion implantation apparatus, and ion implantation method | Doyeon KIM, Hyun YOON | 2024-04-16 |
| 11887883 | Heterogeneous composite material and method for producing the same | Do Yeon Kim, Pil Kyun HEO, Hyun Yoon, Jong Min Lee, Chul Baik | 2024-01-30 |
| 11806767 | Substrate processing apparatus and substrate processing method | — | 2023-11-07 |
| 11804371 | Substrate treatment apparatus and method of performing treatment process on substrate | Do Yeon Kim, Se-hoon Oh, Won Geun KIM, Ju-Mi Lee, Pil Kyun HEO +3 more | 2023-10-31 |
| 9748118 | Substrate treating apparatus | Yu Hwan Kim, Jung Bong Choi | 2017-08-29 |