Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4902635 | Method for production of compound semicondutor devices | Yoshinori Imamura, Masaru Miyazaki, Akihisa Terano, Nobutoshi Matsunaga | 1990-02-20 |
| 4614706 | Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching | Toshiharu Matsuzawa, Takao Iwayanagi, Kikuo Douta, Takahiro Kohashi, Saburo Nonogaki | 1986-09-30 |
| 4536421 | Method of forming a microscopic pattern | Toshiharu Matsuzawa, Kikuo Douta, Takao Iwayanagi | 1985-08-20 |
| 4321104 | Photoetching method | Norio Hasegawa, Naoki Yamamoto | 1982-03-23 |