Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Genichi Nanasaki, Seiichi Kaise, Masatomo KITA, Takashi Takizawa +1 more | 2025-04-29 |
| 12062557 | Substrate processing system and particle removal method | Genichi Nanasaki, Daisuke Hara, Hikaru Nihei, Tatsuya Morioka, Akihiro Matsui | 2024-08-13 |
| D693319 | Holding pad for transferring a wafer | — | 2013-11-12 |
| D691974 | Holding pad for transferring a wafer | — | 2013-10-22 |