Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822233 | Image pickup apparatus and focus adjustment method using bending correction to adjust focusing | Yoshito Fujiwara, Yoshihiro Kato | 2023-11-21 |
| 10706527 | Correction method, correction apparatus, and inspection apparatus | Tsunehito KOHYAMA, Haruhiko Kusunose, Kiwamu Takehisa, Itaru Matsugu | 2020-07-07 |
| 10319088 | Inspection apparatus of EUV mask and its focus adjustment method | Kiwamu Takehisa | 2019-06-11 |
| 10156664 | Mask inspection apparatus and mask inspection method | Kiwamu Takehisa | 2018-12-18 |
| 9786057 | Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method | Masafumi Shinoda | 2017-10-10 |
| 9638739 | Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask | Haruhiko Kusunose | 2017-05-02 |