Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529608 | Substrate processing apparatus and substrate processing method | Moriyoshi Kinoshita, Hiroyuki Matsuyoshi | 2020-01-07 |
| 5964962 | Substrate for solar cell and method for producing the same; substrate treatment apparatus; and thin film solar cell and method for producing the same | Hitoshi Sannomiya, Minoru Murakami, Takashi Tomita | 1999-10-12 |
| 5500388 | Heat treatment process for wafers | Reiji Niino, Tomoyuki Ohbu, Hiroaki Ikegawa, Ken Nakao, Yoshiyuki Fujita +3 more | 1996-03-19 |