| 6218264 |
Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range |
Johann W. Bartha, Thomas Bayer, Johann Greschner, Martin Nonnenmacher, deceased |
2001-04-17 |
| 6091124 |
Micromechanical sensor for AFM/STM profilometry |
Thomas Bayer, Johann Greschner |
2000-07-18 |
| 6088320 |
Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft |
Thomas Bayer, Johann Greschner |
2000-07-11 |
| 5960255 |
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
Johann W. Bartha, Thomas Bayer, Johann Greschner, Martin Nonnenmacher, deceased |
1999-09-28 |
| 5665905 |
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
Johann W. Bartha, Thomas Bayer, Johann Greschner, Martin Nonnenmacher, deceased |
1997-09-09 |
| 5578745 |
Calibration standards for profilometers and methods of producing them |
Thomas Bayer, Johann Greschner, Yves Martin, Klaus Meissner |
1996-11-26 |
| 5534359 |
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
Johann W. Bartha, Thomas Bayer, Johann Greschner, Martin Nonnenmacher, deceased |
1996-07-09 |
| 5382795 |
Ultrafine silicon tips for AFM/STM profilometry |
Thomas Bayer, Johann Greschner, Yves Martin, Hemantha K. Wickramasinghe, Olaf Wolter |
1995-01-17 |
| 5242541 |
Method of producing ultrafine silicon tips for the AFM/STM profilometry |
Thomas Bayer, Johann Greschner, Yves Martin, Hemantha K. Wickramasinghe, Olaf Wolter |
1993-09-07 |
| 5116462 |
Method of producing micromechanical sensors for the AFM/STM profilometry |
Johann W. Bartha, Thomas Bayer, Johann Greschner, Georg Kraus, Olaf Wolter |
1992-05-26 |
| 5051379 |
Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
Thomas Bayer, Johann Greschner, Georg Kraus, Olaf Wolter |
1991-09-24 |