Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970818 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Junwei Bao, Ching-Ling Meng, Holger Tuitje, Mihail Mihaylov, Yan Chen +2 more | 2018-05-15 |
| 7869040 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Hidong Kwak, Shankar Krishnan, Shing Lee | 2011-01-11 |
| 7408641 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Hidong Kwak, Shankar Krishnan, Shing Lee | 2008-08-05 |
| 7190441 | Methods and systems for preparing a sample for thin film analysis | James T. McWhirter, Liang Wang, Hidong Kwak, Dan G. Georgesco, Bernard Lautee +3 more | 2007-03-13 |