Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6293850 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-09-25 |
| 6241582 | Chemical mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-06-05 |
| 6234876 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-05-22 |
| 6228420 | Method to maintain consistent thickness of thin film deposited by chemical vapor deposition | Juen-Kuen Lin, Chien-Hsin Lai, Fu-Yang Yu | 2001-05-08 |
| 6183350 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-02-06 |
| 6106714 | Filtering apparatus with stirrer in a CMP apparatus | Peng-Yih Peng | 2000-08-22 |
| 6062963 | Retainer ring design for polishing head of chemical-mechanical polishing machine | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu | 2000-05-16 |
| 6030892 | Method of preventing overpolishing in a chemical-mechanical polishing operation | Kun-Lin Wu, Horng-Bor Lu, Jenn-Tarng Lin | 2000-02-29 |