Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Chi-Yang Cheng, Paul J. Murphy +4 more | 2025-04-15 |
| 9070538 | Pinched plasma bridge flood gun for substrate charge neutralization | Ali Shajii, David Sonnenshein, Michael Kishinevsky, Andrew Cowe | 2015-06-30 |