| 12207385 |
Method and apparatus for plasma ignition in toroidal plasma sources |
Ilya Pokidov, Chiu-Ying Tai, Joseph Desjardins, Michael Harris |
2025-01-21 |
| 12159765 |
Method and apparatus for plasma generation |
Ron Collins, Andrew Cowe |
2024-12-03 |
| 11854839 |
Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation |
Andrew Cowe |
2023-12-26 |
| 11745229 |
Endpoint detection of deposition cleaning in a pumping line and a processing chamber |
— |
2023-09-05 |
| 11664197 |
Method and apparatus for plasma generation |
Andrew Cowe, Ron Collins, Larry Bourget |
2023-05-30 |
| 11480457 |
Predictive diagnostics systems and methods using vacuum pressure control valves |
David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict |
2022-10-25 |
| 11367598 |
Method and apparatus for deposition cleaning in a pumping line |
Scott Benedict, Kevin W. Wenzel |
2022-06-21 |
| 11054058 |
Actively cooled vacuum isolation valve |
David F. Broyer, David Neumeister, Bradly Raymond Lefevre |
2021-07-06 |
| 11024489 |
Method and apparatus for deposition cleaning in a pumping line |
Scott Benedict, Kevin W. Wenzel |
2021-06-01 |
| 10649471 |
Method and apparatus for pulse gas delivery with isolation valves |
Junhua Ding, Michael L'Bassi |
2020-05-12 |
| 10557736 |
Predictive diagnostics systems and methods using vacuum pressure control valves |
David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict |
2020-02-11 |
| 10535506 |
Method and apparatus for deposition cleaning in a pumping line |
Scott Benedict, Kevin W. Wenzel |
2020-01-14 |
| 10337105 |
Method and apparatus for valve deposition cleaning and prevention by plasma discharge |
— |
2019-07-02 |
| 9945486 |
Radial sealing butterfly valve |
— |
2018-04-17 |
| 9133960 |
Fluid control valves |
Paul D. Lucas, Jaroslaw Pisera |
2015-09-15 |
| 8689822 |
Pressure regulation in remote zones |
Ali Shajii, Siddharth P. Nagarkatti |
2014-04-08 |
| 8037896 |
Pressure regulation in remote zones |
Ali Shajii, Siddharth P. Nagarkatti |
2011-10-18 |
| 7950294 |
Preventive maintenance diagnostics for valve systems |
Vladislav Davidkovich |
2011-05-31 |
| 7643909 |
Highly responsive master-slave valve positioning |
David J. Goldman, Martin Ryan, Vladislav Davidkovich |
2010-01-05 |
| 7369920 |
Pressure control system with optimized performance |
Vladislav Davidkovich, Dave Chamberlain, Paul D. Lucas |
2008-05-06 |
| 4799063 |
Method and apparatus for isolating faults in an antenna system |
— |
1989-01-17 |