Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163777 | Device and method for imaging and interferometry measurements | Alain Courteville | 2024-12-10 |
| 11662199 | Method and device for measuring interfaces of an optical element | Sylvain PETITGRAND | 2023-05-30 |
| 10240977 | Method for 2D/3D inspection of an object such as a wafer | Alain Courteville, Philippe Gastaldo | 2019-03-26 |
| 10074172 | Device and method for making dimensional measurements on multilayer objects such as wafers | Sylvain Perrot | 2018-09-11 |
| 10043266 | Method and device for controllably revealing structures buried in objects such as wafers | Sylvain Perrot | 2018-08-07 |
| 9958261 | Device and method for surface profilometry for the control of wafers during processing | — | 2018-05-01 |
| 9897927 | Device and method for positioning a photolithography mask by a contactless optical method | Guenael Ribette | 2018-02-20 |
| 9739600 | Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer | Alain Courteville, Philippe Gastaldo | 2017-08-22 |
| 9494529 | Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer with variable spatial resolution | Alain Courteville, Philippe Gastaldo | 2016-11-15 |
| 9151941 | Optical device and method for inspecting structured objects | — | 2015-10-06 |
| 7033068 | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves | Gil Ching, Vincent Perrut, Vincent Ruch | 2006-04-25 |
| 6880560 | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves | Gil Ching, Vincent Perrut, Vincent Ruch | 2005-04-19 |