Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7033068 | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves | Gil Ching, Vincent Perrut, Gilles Fresquet | 2006-04-25 |
| 6880560 | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves | Gil Ching, Vincent Perrut, Gilles Fresquet | 2005-04-19 |