Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325085 | Method and system for uniformly irradiating a frame of a processed substrate | Fulvio MAZZAMUTO, Nabil Douri, Guillaume Vincent Thebault, Karim Huet, Guillermo Abraham Gonzalez Trujillo | 2025-06-10 |
| 12040201 | System and method to minimize irradiation non uniformity | Fulvio MAZZAMUTO, Nabil Douri, Guillaume Vincent Thebault, Karim Huet, Martin Heintzmann | 2024-07-16 |
| 11454543 | Apparatus and method for measuring the surface temperature of a substrate | — | 2022-09-27 |
| 10074172 | Device and method for making dimensional measurements on multilayer objects such as wafers | Gilles Fresquet | 2018-09-11 |
| 10043266 | Method and device for controllably revealing structures buried in objects such as wafers | Gilles Fresquet | 2018-08-07 |
| 9162870 | Linear fluidic actuator | Benjamin Rousseau, Thierry Bonnin, Jean Taboury, Raymond Mercier | 2015-10-20 |
| 8995063 | Optical device with adjustable optical surface | Benjamin Rousseau, Thierry Bonnin, Jean Taboury, Raymond Mercier | 2015-03-31 |