Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7800086 | Arrangement for radiation generation by means of a gas discharge | Christian Ziener, Guido Hergenhan, Juergen Kleinschmidt | 2010-09-21 |
| 7649187 | Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated | Guido Hergenhan, Christian Ziener | 2010-01-19 |
| 7477673 | Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge | Christian Ziener, Guido Hergenhan, Carsten Thode | 2009-01-13 |