Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068140 | Method and system for monitoring substrate processing apparatus | Sejin OH, Taemin Earmme, Jongwoo Sun | 2024-08-20 |
| 10643858 | Method of etching substrate | Sangrok Oh, Jungmo Sung, Jongwoo Sun | 2020-05-05 |
| 9859175 | Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same | Kiwook Song, Bum-Soo Kim, Kye Hyun Baek, Masayuki Tomoyasu, Jong-Seo Hong | 2018-01-02 |