Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee +1 more | 2024-01-02 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee +1 more | 2023-02-14 |
| 11033244 | In vivo radiation amount measuring instrument using film dosimeter that undergoes shape change with expansion | Young Kyung Lim, Ui Jung Hwang, Kwan Ho Cho, Se Byeong Lee, Dongho Shin +8 more | 2021-06-15 |
| 10816480 | Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same | Aleksandr Sergeevich Shorokhov, Anton Sergeevich MEDVEDEV, Maksim Riabko, Sang Woo BAE, Akinori Okubo +3 more | 2020-10-27 |