Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237207 | Method for forming a buried metal line in a semiconductor substrate | Boon Teik Chan, Zheng Tao, Anshul Gupta, Basoene Briggs | 2025-02-25 |
| 11527431 | Methods of semiconductor device processing | Boon Teik Chan, Geert Mannaert | 2022-12-13 |
| 11430697 | Method of forming a mask layer | Boon Teik Chan, Zheng Tao | 2022-08-30 |
| 11430876 | Method for producing self-aligned gate and source/drain via connections for contacting a FET transistor | Boon Teik Chan, Dunja Radisic, Steven Demuynck, Soon Aik Chew | 2022-08-30 |
| 10978335 | Method for producing a gate cut structure on an array of semiconductor fins | Boon Teik Chan, Ryan Ryoung-Han Kim | 2021-04-13 |
| 10825682 | Method for producing a pillar structure in a semiconductor layer | Boon Teik Chan, Vasile Paraschiv, Zheng Tao | 2020-11-03 |
| 10784158 | Area-selective deposition of a tantalum silicide TaSix mask material | Boon Teik Chan | 2020-09-22 |
| 10782607 | Reticles for lithography | Boon Teik Chan, Kim Vu Luong, Vicky Philipsen, Kevin Vandersmissen | 2020-09-22 |
| 10493378 | Method of forming micro-pipes on a substrate and a structure formed thereof | Zheng Tao, Boon Teik Chan, XiuMei Xu, Khashayar Babaei Gavan | 2019-12-03 |
| 9520298 | Plasma method for reducing post-lithography line width roughness | Peter De Schepper, Jean-Francois de Marneffe | 2016-12-13 |
| 8883374 | EUV photoresist encapsulation | — | 2014-11-11 |