Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823925 | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Mei Sun, Jing Zhou, Ran Liu | 2023-11-21 |
| 11668601 | Instrumented substrate apparatus | Robert Tas | 2023-06-06 |
| 10900843 | In-situ temperature sensing substrate, system, and method | — | 2021-01-26 |
| 10777393 | Process condition sensing device and method for plasma chamber | Mei Sun | 2020-09-15 |
| 10460966 | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | Mei Sun, Jing Zhou, Ran Liu | 2019-10-29 |
| 10215626 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line | Mei Sun, Kevin O'Brien | 2019-02-26 |
| 9964440 | Wafer level spectrometer | Mei Sun, Kevin O'Brien | 2018-05-08 |
| 9823121 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line | Mei Sun, Kevin O'Brien | 2017-11-21 |
| 9719867 | Method and system for measuring heat flux | Stephen Sharratt, Farhat A. Quli, Mei Sun | 2017-08-01 |
| 9620400 | Position sensitive substrate device | Kevin O'Brien | 2017-04-11 |
| 9360302 | Film thickness monitor | Kevin O'Brien, Farhat A. Quli, Mei Sun | 2016-06-07 |
| 9356822 | Automated interface apparatus and method for use in semiconductor wafer handling systems | — | 2016-05-31 |
| 9305753 | Thickness change monitor wafer for in situ film thickness monitoring | Kevin O'Brien | 2016-04-05 |
| 9304160 | Defect inspection apparatus, system, and method | Christopher P. Kirk | 2016-04-05 |
| 9222842 | High temperature sensor wafer for in-situ measurements in active plasma | Mei Sun, Farhat A. Quli, Stephen Sharratt | 2015-12-29 |
| 9140604 | Wafer level spectrometer | Mei Sun, Kevin O'Brien | 2015-09-22 |
| 9134186 | Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces | Mei Sun, Farhat A. Quli, Paul Arleo, Vaibhaw Vishal | 2015-09-15 |
| 8889021 | Process condition sensing device and method for plasma chamber | Mei Sun | 2014-11-18 |
| 7855549 | Integrated process condition sensing wafer and data analysis system | Wayne G. Renken, Roy Gordon, Brian Paquette, Mei Sun | 2010-12-21 |
| 7555948 | Process condition measuring device with shielding | Lynn K. Wiese | 2009-07-07 |
| 7540188 | Process condition measuring device with shielding | Lynn K. Wiese | 2009-06-02 |
| 7151366 | Integrated process condition sensing wafer and data analysis system | Wayne G. Renken, Roy Gordon | 2006-12-19 |
| 7149643 | Integrated process condition sensing wafer and data analysis system | Wayne G. Renken, Roy Gordon | 2006-12-12 |
| 7135852 | Integrated process condition sensing wafer and data analysis system | Wayne G. Renken, Roy Gordon, Brian Paquette, Mei Sun | 2006-11-14 |
| 6729394 | Method of producing a communicating horizontal well network | David Hassan, Michael D. Chernichen | 2004-05-04 |