Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158499 | Semiconductor component and method for fabricating the same | Yongchul Oh | 2021-10-26 |
| 11133227 | Semiconductor device having active region and method for fabricating the same | Yongchul Oh | 2021-09-28 |
| 9551653 | Methods for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Sung-Soo Moon, Jung-Hoon Byun, Ji-Hye Lee +2 more | 2017-01-24 |
| 9322771 | Apparatus and method for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Sung-Soo Moon, Jung-Hoon Byun, Ji-Hye Lee +2 more | 2016-04-26 |
| 9165354 | Method of analyzing photolithography processes | Woong-Kyu Son, Hyo-Cheon Kang, Jae-Kwan Park, Jeong-Ho Ahn, Soo-Bok Chin | 2015-10-20 |
| 7466853 | Method and apparatus for detecting defects on a wafer | Byoung-Ho Lee | 2008-12-16 |
| 7245365 | Apparatus and method for detecting particles on an object | Duck-Sun Yang | 2007-07-17 |
| 7200258 | Method for selecting reference images, method and apparatus for inspecting patterns on wafers, and method for dividing a wafer into application regions | Byoung-Ho Lee | 2007-04-03 |
| 7084969 | Method of optimizing focus of optical inspection apparatus and method and apparatus of detecting defects using the same | Seong Jin Kim | 2006-08-01 |
| 6995074 | Method for manufacturing a semiconductor wafer | — | 2006-02-07 |
| 6545491 | Apparatus for detecting defects in semiconductor devices and methods of using the same | Yang-hyong Kim, Hyo-Cheon Kang | 2003-04-08 |
| 6525318 | Methods of inspecting integrated circuit substrates using electron beams | Yang-hyong Kim, Hyo-Cheon Kang, Sang-myun Lee | 2003-02-25 |
| 6100102 | Method of in-line monitoring for shallow pit on semiconductor substrate | Yang-hyong Kim, Chun-ha Hwang, Hyo-Cheon Kang | 2000-08-08 |