Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6545491 | Apparatus for detecting defects in semiconductor devices and methods of using the same | Hyo-Cheon Kang, Deok-Yong Kim | 2003-04-08 |
| 6525318 | Methods of inspecting integrated circuit substrates using electron beams | Hyo-Cheon Kang, Deok-Yong Kim, Sang-myun Lee | 2003-02-25 |
| 6100102 | Method of in-line monitoring for shallow pit on semiconductor substrate | Chun-ha Hwang, Hyo-Cheon Kang, Deok-Yong Kim | 2000-08-08 |