| 6498348 |
Apparatus and method relating to charged particles |
— |
2002-12-24 |
| 5389793 |
Apparatus and methods for ion implantation |
Frederick J. Robinson, Michael T. Wauk, II |
1995-02-14 |
| 5300785 |
Apparatus for and method of producing ion beams |
— |
1994-04-05 |
| 5194748 |
Method and apparatus relating to ion implantation |
— |
1993-03-16 |
| 5124557 |
Apparatus and methods relating to ion implantation and heat transfer |
— |
1992-06-23 |
| 5099130 |
Apparatus and methods relating to scanning ion beams |
— |
1992-03-24 |
| 4847504 |
Apparatus and methods for ion implantation |
— |
1989-07-11 |
| 4782304 |
Systems and methds for ion beam acceleration |
— |
1988-11-01 |
| 4754200 |
Systems and methods for ion source control in ion implanters |
Frederick Plumb, Christopher P. Wright, Nicholas Bright, Bernard Harrison |
1988-06-28 |
| 4743767 |
Systems and methods for ion implantation |
Frederick Plumb, Christopher P. Wright, Nicholas Bright, Bernard Harrison |
1988-05-10 |
| 4682566 |
Evacuated equipment |
— |
1987-07-28 |
| 4587432 |
Apparatus for ion implantation |
— |
1986-05-06 |
| 4580619 |
Components for evacuated equipment |
— |
1986-04-08 |
| 4578589 |
Apparatus and methods for ion implantation |
— |
1986-03-25 |
