Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910218 | Cleaning and refurbishing chamber components having metal coatings | Yixing Lin, Clifford Stow | 2011-03-22 |
| 7579067 | Process chamber component with layered coating and method | Yixing Lin, Clifford Stow | 2009-08-25 |
| 5858847 | Method for a lightly doped drain structure | Mei Sheng Zhou, Yelehanka Ramachandramurthy Pradeep | 1999-01-12 |