Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6003185 | Hesitation free roller | Albert M. Saenz, Wilbur C. Krusell, William G. Drapak | 1999-12-21 |
| 5975736 | Scrubber control system | Mark Simmons, Martin J. McGrath | 1999-11-02 |
| 5840129 | Hesitation free roller | Albert M. Saenz, Wilbur C. Krusell, William G. Drapak | 1998-11-24 |
| 5762084 | Megasonic bath | Wilbur C. Krusell, Lynn Ryle | 1998-06-09 |
| 5745946 | Substrate processing system | Lynn Ryle, Robert M. Ruppell, John Hearne, Wilbur C. Krussell, Gary D. Youre | 1998-05-05 |
| 5727332 | Contamination control in substrate processing system | John Hearne, Lynn Ryle | 1998-03-17 |
| 5606251 | Method and apparatus for detecting a substrate in a substrate processing system | Lynn Ryle, Robert M. Ruppell, Martin J. McGrath | 1997-02-25 |
| 5548505 | Scrubber control system | Mark Simmons, Martin J. McGrath | 1996-08-20 |
| 5475889 | Automatically adjustable brush assembly for cleaning semiconductor wafers | Lynn Ryle | 1995-12-19 |
| 4616683 | Particle-free dockable interface for integrated circuit processing | Barclay J. Tullis, Mihir Parikh, Mark Johnston | 1986-10-14 |
| 4532970 | Particle-free dockable interface for integrated circuit processing | Barclay J. Tullis, Mihir Parikh, Mark Johnston | 1985-08-06 |