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Area efficient series MIM capacitor |
Queennie Suan Imm Lim |
2015-10-27 |
| 8519403 |
Angled implantation for deep submicron device optimization |
Che Ta Hsu, Christopher J. Pass, Jeffrey T. Watt, Yanzhong Xu |
2013-08-27 |
| 7883946 |
Angled implantation for deep submicron device optimization |
Che Ta Hsu, Christopher J. Pass, Jeffrey T. Watt, Yanzhong Xu |
2011-02-08 |
| 5877407 |
Plasma etch end point detection process |
Gardy Cadet, Tseng-Chung Lee, Edward A. Rietman |
1999-03-02 |
| 5653894 |
Active neural network determination of endpoint in a plasma etch process |
Tseng-Chung Lee, Helen L. Maynard, Edward A. Rietman |
1997-08-05 |
| 5654903 |
Method and apparatus for real time monitoring of wafer attributes in a plasma etch process |
Edward A. Reitman, Tseng-Chung Lee |
1997-08-05 |
| 5494697 |
Process for fabricating a device using an ellipsometric technique |
Nadine Blayo, Tseng-Chung Lee |
1996-02-27 |
| 4960656 |
Devices and process for producing devices containing silicon nitride films |
Chorng-Ping Chang, Daniel Flamm, John A. Mucha |
1990-10-02 |
| 4918031 |
Processes depending on plasma generation using a helical resonator |
Daniel Flamm, Wayne Johnson |
1990-04-17 |
| 4689115 |
Gaseous etching process |
Charles W. Tu |
1987-08-25 |
| 4498953 |
Etching techniques |
Joel M. Cook, Vincent M. Donnelly, Daniel Flamm, John A. Mucha |
1985-02-12 |
| 4397711 |
Crystallographic etching of III-V semiconductor materials |
Vincent M. Donnelly, Daniel Flamm |
1983-08-09 |