Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Myungjun Lee, Wookrae Kim, Jaehwang Jung, Jinseob Kim | 2024-06-04 |
| 11624699 | Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light | Jaehwang Jung, Wookrae Kim, Myoungki Ahn | 2023-04-11 |
| 10383508 | Endoscope, handpiece of endoscope, calibration method therefor, and method for using the same | Euiheon Chung, Wonshik Choi | 2019-08-20 |