| 9107637 |
X-ray imaging apparatus and wavefront measuring apparatus |
Naoki Kohara |
2015-08-18 |
| 9066704 |
X-ray imaging apparatus |
Toru Den, Kimiaki Yamaguchi |
2015-06-30 |
| 9063055 |
X-ray imaging apparatus |
— |
2015-06-23 |
| 9046466 |
X-ray imaging apparatus |
— |
2015-06-02 |
| 9043182 |
Absolute position measurement apparatus and method |
Yuzo Seo, Takao Ukaji |
2015-05-26 |
| 8995613 |
X-ray imaging apparatus |
— |
2015-03-31 |
| 8559594 |
Imaging apparatus and imaging method |
Kentaro Nagai |
2013-10-15 |
| 8537966 |
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program |
Kentaro Nagai, Toru Den, Hidenosuke Itoh |
2013-09-17 |
| 8520217 |
Talbot interferometer, its adjustment method, and measurement method |
Toshiyuki Naoi, Seima Kato, Naoki Kohara |
2013-08-27 |
| 8351050 |
Wavefront-aberration-measuring device and exposure apparatus |
— |
2013-01-08 |
| 8340243 |
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program |
Kentaro Nagai, Toru Den, Hidenosuke Itoh |
2012-12-25 |
| 8077391 |
Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method |
Masanobu Hasegawa, Seima Kato |
2011-12-13 |
| 8009797 |
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program |
Kentaro Nagai, Toru Den, Hidenosuke Itoh |
2011-08-30 |
| 8004691 |
Measuring apparatus, exposure apparatus and method, and device manufacturing method |
Akihiro Nakauchi, Seima Kato |
2011-08-23 |
| 7952726 |
Measurement apparatus, exposure apparatus having the same, and device manufacturing method |
Seima Kato |
2011-05-31 |
| 7253907 |
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method |
— |
2007-08-07 |
| 7106452 |
Measuring device and measuring method |
— |
2006-09-12 |
| 6961132 |
Interference system and semiconductor exposure apparatus having the same |
— |
2005-11-01 |
| 6853442 |
Projection exposure apparatus and device manufacturing method that change a resonator length of a continuous emission excimer laser |
— |
2005-02-08 |
| 6774982 |
Exposure apparatus and device manufacturing method using the same |
— |
2004-08-10 |
| 6721056 |
Surface shape measuring apparatus and method |
Akihiro Nakauchi |
2004-04-13 |
| 6661522 |
Interference system and semiconductor exposure apparatus having the same |
— |
2003-12-09 |
| 6322220 |
Exposure apparatus and device manufacturing method using the same |
Naoto Sano |
2001-11-27 |
| 5067811 |
Illuminance distribution measuring system |
— |
1991-11-26 |
