Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719773 | Measuring method and measuring apparatus | — | 2017-08-01 |
| 8868366 | Calculation method and calculation apparatus | — | 2014-10-21 |
| 8823950 | Shape measurement apparatus, and shape measurement method | — | 2014-09-02 |
| 8345263 | Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern | — | 2013-01-01 |
| 8314937 | Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern | — | 2012-11-20 |
| 8004691 | Measuring apparatus, exposure apparatus and method, and device manufacturing method | Chidane Ouchi, Seima Kato | 2011-08-23 |
| 7619748 | Exposure apparatus mounted with measuring apparatus | — | 2009-11-17 |
| 7602473 | Exposure apparatus and device manufacturing method using the same | — | 2009-10-13 |
| 7403291 | Method of calculating two-dimensional wavefront aberration | Kazuki Yamamoto | 2008-07-22 |
| 7081962 | Aberration measuring apparatus for an optical system utilizing soft x-rays | — | 2006-07-25 |
| 6977728 | Projection exposure apparatus and aberration measurement method | — | 2005-12-20 |
| 6859264 | Projection exposure apparatus having aberration measurement device | Ryuichi Sato | 2005-02-22 |
| 6721056 | Surface shape measuring apparatus and method | Chidane Ouchi | 2004-04-13 |
| 6650398 | Wavefront aberration measurement method and projection exposure apparatus | Ryuichi Sato | 2003-11-18 |