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Method of manufacturing semiconductors using fluid delivery system |
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Method of manufacturing semiconductors using fluid delivery system |
Phillip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman |
2024-05-21 |
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Fluid control system |
Philip Ryan Barros, Greg Patrick Mulligan |
2023-06-20 |
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Liquid delivery system |
Phillip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman |
2021-10-26 |
| 11158522 |
Fluid delivery system |
Philip Ryan Barros, Haruyuki KUBOTA, Randolph Treur, Todd Cushman |
2021-10-26 |
| 11094563 |
Fluid control system |
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2021-08-17 |
| 8020750 |
Method of attaching components to fluid delivery systems using diffusion bonding |
Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more |
2011-09-20 |
| 8017028 |
Method of increasing etchability of metals having chemical etching resistant microstructure |
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2011-09-13 |
| 7984891 |
Manufacture of an integrated fluid delivery system for semiconductor processing apparatus |
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2011-07-26 |
| 7850786 |
Method of improving corrosion resistance of stainless steel surfaces by a process of passivation |
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2010-12-14 |
| 7559527 |
Diffusion bonded fluid flow manifold with partially integrated inter-active component |
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2009-07-14 |
| 7459003 |
In-line filter in a diffusion bonded layered substrate |
Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more |
2008-12-02 |
| 7448276 |
Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate |
Mark Crockett, John W. Lane, Micahel DeChellis, Erica Porras, Aneesh Khullar +1 more |
2008-11-11 |
| 7437944 |
Method and apparatus for pressure and mix ratio control |
John W. Lane |
2008-10-21 |
| 7204155 |
Method and apparatus for pressure control and flow measurement |
John W. Lane, Ralph Straube |
2007-04-17 |
| 7089134 |
Method and apparatus for analyzing gas flow in a gas panel |
Philip Ryan Barros, Raul Martin, Russell Norman |
2006-08-08 |
| 6878037 |
Slurry pump control system |
— |
2005-04-12 |
| 6595829 |
Slurry pump control system |
— |
2003-07-22 |
| 6183341 |
Slurry pump control system |
— |
2001-02-06 |
