Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6434327 | Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature | James F. Gibbons | 2002-08-13 |
| 6410456 | Method and apparatus for insitu vapor generation | Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2002-06-25 |
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Israel Beinglass, Mahalingam Venkatesan | 2002-06-11 |
| 6159866 | Method for insitu vapor generation for forming an oxide on a substrate | Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2000-12-12 |
| 6122439 | Rapid thermal heating apparatus and method | James F. Gibbons | 2000-09-19 |
| 6037273 | Method and apparatus for insitu vapor generation | Peter A. Knoot, Gary E. Miner, Guangcai Xing, David R. Lopes, Satheesh Kuppurao | 2000-03-14 |
| 6016383 | Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature | James F. Gibbons | 2000-01-18 |
| 5840125 | Rapid thermal heating apparatus including a substrate support and an external drive to rotate the same | James F. Gibbons | 1998-11-24 |
| 5790751 | Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature | James F. Gibbons | 1998-08-04 |
| 5767486 | Rapid thermal heating apparatus including a plurality of radiant energy sources and a source of processing gas | James F. Gibbons | 1998-06-16 |
| 5743643 | Rapid thermal heating apparatus and method | James F. Gibbons | 1998-04-28 |
| 5708755 | Rapid thermal heating apparatus and method | James F. Gibbons | 1998-01-13 |
| 5689614 | Rapid thermal heating apparatus and control therefor | James F. Gibbons | 1997-11-18 |
| 5683173 | Cooling chamber for a rapid thermal heating apparatus | James F. Gibbons | 1997-11-04 |
| 5576059 | Depositing polysilicon films having improved uniformity and apparatus therefor | Israel Beinglass, Mahalingam Venkatesan | 1996-11-19 |
| 5487127 | Rapid thermal heating apparatus and method utilizing plurality of light pipes | James F. Gibbons | 1996-01-23 |
| 5317492 | Rapid thermal heating apparatus and method | James F. Gibbons | 1994-05-31 |
| 5155336 | Rapid thermal heating apparatus and method | James F. Gibbons | 1992-10-13 |
| 4764439 | Photoelectrochemical cell | James F. Gibbons, George W. Cogan, Nathan S. Lewis | 1988-08-16 |
| 4459343 | Nonaqueous electrolyte photoelectrochemical cell | James F. Gibbons, George W. Cogan, Nathan S. Lewis | 1984-07-10 |