Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Jeff Gasparitsch, Gene Hempel, Erik H. Engdahl | 2003-11-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Jeff Gasparitsch, Gene Hempel, Erik H. Engdahl | 2003-11-11 |