Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7858911 | Confocal wafer inspection system and method | Tao-Yi Fu, Bin-Ming Benjamin Tsai, Scott A. Young | 2010-12-28 |
| 7554655 | High throughput brightfield/darkfield water inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2009-06-30 |
| 7522275 | High throughput darkfield/brightfield wafer inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2009-04-21 |
| 7399950 | Confocal wafer inspection method and apparatus using fly lens arrangement | Tao-Yi Fu, Bin-Ming Benjamin Tsai, Scott A. Young | 2008-07-15 |
| 7379173 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2008-05-27 |
| 7259844 | High throughput darkfield/brightfield wafer inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2007-08-21 |
| 7164475 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2007-01-16 |
| 7109458 | Confocal wafer depth scanning inspection method | Tao-Yi Fu, Bin-Ming Benjamin Tsai, Scott A. Young | 2006-09-19 |
| 6867406 | Confocal wafer inspection method and apparatus using fly lens arrangement | Tao-Yi Fu, Bin-Ming Benjamin Tsai, Scott A. Young | 2005-03-15 |
| 6816249 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2004-11-09 |
| 6288780 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai | 2001-09-11 |
| 5963314 | Laser imaging system for inspection and analysis of sub-micron particles | Bruce W. Worster, Dale E. Crane, Hans J. Hansen, Ken Kinsun Lee | 1999-10-05 |
| 5783814 | Method and apparatus for automatically focusing a microscope | Timothy V. Thompson, Ken Kinsun Lee | 1998-07-21 |
| 5672861 | Method and apparatus for automatic focusing of a confocal laser microscope | Timothy V. Thompson, Ken Kinsun Lee | 1997-09-30 |
| 5557113 | Method and structure for generating a surface image of a three dimensional target | Abigail A. Moorhouse, Phillip R. Rigg, Alan L. Helgesson | 1996-09-17 |
| 5479252 | Laser imaging system for inspection and analysis of sub-micron particles | Bruce W. Worster, Dale E. Crane, Hans J. Hansen, Ken Kinsun Lee | 1995-12-26 |
| 5019786 | Phase measurement system using a dithered clock | Steven R. Patterson | 1991-05-28 |