Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D921431 | Multi-filament heater assembly | Sandeep Krishnan, Aniruddha Bagchi, Alexander I. Gurary, Chenghung Paul Chang, Ian Kunsch +1 more | 2021-06-08 |
| 10570510 | Periphery purge shutter and flow control systems and methods | Eric A. Armour, Ian Kunsch | 2020-02-25 |
| 10167554 | Wafer processing with carrier extension | Guanghua Wei, Eric A. Armour, Ajit Paranjpe | 2019-01-01 |
| 10017876 | Chemical vapor deposition flow inlet elements and methods | Mikhail Belousov, Keng Moy | 2018-07-10 |
| 10002805 | Processing methods and apparatus with temperature distribution control | Alexander I. Gurary, Mikhail Belousov, Vadim Boguslavskiy | 2018-06-19 |
| 9982362 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Alexander I. Gurary, William E. Quinn, Eric A. Armour | 2018-05-29 |
| 9938621 | Methods of wafer processing with carrier extension | Guanghua Wei, Eric A. Armour, Ajit Paranjpe | 2018-04-10 |
| 9324590 | Processing methods and apparatus with temperature distribution control | Alex Gurary, Mikhail Belousov, Vadim Boguslavskiy | 2016-04-26 |
| 9273395 | Gas treatment systems | Alex Gurary, Eric A. Armour | 2016-03-01 |
| 9053935 | Chemical vapor deposition with elevated temperature gas injection | Alexander I. Gurary, Mikhail Belousov | 2015-06-09 |
| 8980000 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Alex Gurary, William E. Quinn, Eric A. Armour | 2015-03-17 |
| 8937000 | Chemical vapor deposition with elevated temperature gas injection | Alex Gurary, Mikhail Belousov | 2015-01-20 |
| 8895107 | Chemical vapor deposition with elevated temperature gas injection | Alex Gurary, Mikhail Belousov | 2014-11-25 |
| 8888919 | Wafer carrier with sloped edge | Joshua Mangum, William E. Quinn | 2014-11-18 |
| 8636847 | Chemical vapor deposition flow inlet elements and methods | Mikhail Belousov, Keng Moy | 2014-01-28 |
| 8303713 | Chemical vapor deposition flow inlet elements and methods | Mikhail Belousov, Keng Moy | 2012-11-06 |
| 8287646 | Gas treatment systems | Alex Gurary, Eric A. Armour | 2012-10-16 |
| 8152923 | Gas treatment systems | Alex Gurary, Eric A. Armour | 2012-04-10 |