Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7876440 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2011-01-25 |
| 7564557 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2009-07-21 |
| 7433040 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +3 more | 2008-10-07 |
| 7385699 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +3 more | 2008-06-10 |
| 7379183 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +6 more | 2008-05-27 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +10 more | 2008-01-08 |
| 7301634 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +7 more | 2007-11-27 |
| 7289213 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +1 more | 2007-10-30 |
| 7280212 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +3 more | 2007-10-09 |
| 7242477 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Michael Friedmann, Ian Smith, Michael Adel +4 more | 2007-07-10 |