Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838213 | Process for fabricating a mask | Richard J. Kasica | 2005-01-04 |
| 6372393 | Process for fabricating a projection electron lithography mask and a removable, reusable cover for use therein | Carlos G. Caminos, Chester S. Knurek | 2002-04-16 |
| 6368753 | Mask repair | Lloyd R. Harriott | 2002-04-09 |
| 6251543 | Process for fabricating a projection electron lithography mask and a removable reusable cover for use therein | Carlos G. Caminos, Chester S. Knurek | 2001-06-26 |
| 6051346 | Process for fabricating a lithographic mask | Avinoam Kornblit, James A. Liddle | 2000-04-18 |
| 5985493 | Membrane mask for projection lithography | James A. Liddle, Gary Robert Weber | 1999-11-16 |
| 5948570 | Process for dry lithographic etching | Avinoam Kornblit | 1999-09-07 |
| 5688634 | Energy sensitive resist material and process for device fabrication using the resist material | David Mixon | 1997-11-18 |
| 5656182 | Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials | Herschel M. Marchman, Jay Trautman | 1997-08-12 |
| 5451480 | Artical fabrication utilizing lithographic processes | — | 1995-09-19 |
| 5374504 | Resist materials and processes of their use | James E. Hanson | 1994-12-20 |
| 5366851 | Device fabrication process | — | 1994-11-22 |
| 5066566 | Resist materials | — | 1991-11-19 |
| 4935094 | Negative resist with oxygen plasma resistance | David Mixon | 1990-06-19 |
| 4892617 | Processes involving lithographic materials | Frank S. Bates, Mark A. Hartney | 1990-01-09 |
| 4701342 | Negative resist with oxygen plasma resistance | Elsa Reichmanis | 1987-10-20 |