| 12063745 |
Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine |
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2024-08-13 |
| 10322919 |
Maintenance apparatus |
Simon SCHADT, Arndt Evers |
2019-06-18 |
| 8089622 |
Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers |
Michael Hofmann, Wolfgang Vollrath |
2012-01-03 |
| 7028565 |
Method and arrangement for transporting and inspecting semiconductor substrates |
Frank Bernhardt, Knut Hiltawski |
2006-04-18 |
| 6962471 |
Substrate conveying module and system made up of substrate conveying module and workstation |
Knut Hiltawski, Karsten Urban, Joachim Wienecke |
2005-11-08 |
| 6845174 |
Arrangement and method for the identification of substrates |
Dominik Grau, Knut Hiltawski, Frank Bernhardt |
2005-01-18 |
| 6789436 |
Method and arrangement for transporting and inspecting semiconductor substrates |
Frank Bernhardt, Knut Hiltawski |
2004-09-14 |
| 6736582 |
Device for manipulating an object for loading and unloading a clean room |
Andreas Mages, Alfred Schulz, Klaus Schultz |
2004-05-18 |
| 6553850 |
Method and arrangement for transporting and inspecting semiconductor substrates |
Frank Bernhardt, Knut Hiltawski |
2003-04-29 |
| 5636724 |
Device for transferring a transport object between two end positions |
Werner Scheler, Juergen Graefe, Andreas Mages, Erich Adler |
1997-06-10 |
| 5605428 |
Device for indexing magazine compartments and wafer-shaped objects in the compartments |
Berndt Lahne, Klaus Schultz |
1997-02-25 |
| 4406790 |
Method for operating a biological sewage purification plant |
— |
1983-09-27 |