Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368025 | Edge seal for lower electrode assembly | David Schaefer, Keith Gaff, Sung Je Kim, Brooke Mesler Lai | 2025-07-22 |
| 11781650 | Edge seal for lower electrode assembly | David Schaefer, Keith Gaff, Sung Je Kim, Brooke Mesler Lai | 2023-10-10 |
| 10804081 | Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber | David Schaefer, Keith Gaff | 2020-10-13 |
| 9869392 | Edge seal for lower electrode assembly | David Schaefer, Keith Gaff, Sung Lee, Brooke Mesler Lai | 2018-01-16 |
| 9859142 | Edge seal for lower electrode assembly | David Schaefer, Keith Gaff, Sung Lee | 2018-01-02 |
| 9054148 | Method for performing hot water seal on electrostatic chuck | Hong Shih, Tuochuan Huang, David Schaefer, John Daugherty, MingHang Wu +1 more | 2015-06-09 |