Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12333700 | Chemical-dose substrate deposition monitoring | Serghei Malkov | 2025-06-17 |
| 11702744 | Metal oxyfluoride film formation methods | Nitin Deepak, Gayatri Natu, Prerna Goradia, Jennifer Y. Sun | 2023-07-18 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus +6 more | 2023-02-14 |