Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217980 | Apparatus for processing a wafer, and method of controlling such an apparatus | Daniel Brien, Pradeep Thirugnanam, Matija Ponikvar | 2025-02-04 |
| 10861719 | Method and apparatus for processing wafer-shaped articles | David Mui, Butch Berney, Michael Ravkin | 2020-12-08 |
| 10720343 | Method and apparatus for processing wafer-shaped articles | David Mui, Butch Berney, Mike Ravkin | 2020-07-21 |
| 9146007 | Apparatus for liquid treatment of work pieces and flow control system for use in same | Michael Schwaiger, Christopher Miggitsch | 2015-09-29 |