Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7615462 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, R. Scott List | 2009-11-10 | $23,460,000 |
| 7148565 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, R. Scott List | 2006-12-12 | $16,980,000 |
| 6645832 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, R. Scott List | 2003-11-11 | $43,556,000 |