Issued Patents All Time
Showing 76–80 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968850 | In-situ cleaning of light source collector optics | Michael Chan, Mark L. Doczy | 2005-11-29 |
| 6963071 | Debris mitigation device | — | 2005-11-08 |
| 6825988 | Etched silicon diffraction gratings for use as EUV spectral purity filters | — | 2004-11-30 |
| 6809328 | Protective coatings for radiation source components | Manish Chandhok, Kramadhati V. Ravi, Melissa Shell | 2004-10-26 |
| 6809327 | EUV source box | — | 2004-10-26 |