Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7632610 | Sub-resolution assist features | Charles H. Wallace, Swaminathan Sivakumar | 2009-12-15 |
| 7374865 | Methods to pattern contacts using chromeless phase shift masks | Sam Sivakumar | 2008-05-20 |
| 7179570 | Chromeless phase shift lithography (CPL) masks having features to pattern large area line/space geometries | Sam Sivakumar | 2007-02-20 |
| 7056645 | Use of chromeless phase shift features to pattern large area line/space geometries | Sam Sivakumar | 2006-06-06 |