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Non-destructive 3-dimensional chemical imaging of photo-resist material |
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2018-09-18 |
| 9746428 |
Inline inspection of the contact between conductive traces and substrate for hidden defects using white light interferometer with tilted objective lens |
Shuhong Liu, Zhiyong Wang, Deepak Goyal |
2017-08-29 |
| 9508610 |
Inline measurement of molding material thickness using terahertz reflectance |
Shuhong Liu, Zhiyong Wang, Deepak Goyal, Shripad Gokhale, Jieping Zhang |
2016-11-29 |
| 9441952 |
Metrology tool for electroless copper thickness measurement for BBUL process development monitoring |
Zhiyong Wang, Yu-Chun Chen, Shuhong Liu |
2016-09-13 |
| 9389064 |
Inline inspection of the contact between conductive traces and substrate for hidden defects using white light interferometer with tilted objective lens |
Shuhong Liu, Zhiyong Wang, Deepak Goyal |
2016-07-12 |